Agilent is pleased to offer the all-metal UHV Series 54 valves in partnership with VAT, which are suitable for extreme, ultrahigh vacuum (UHV/XHV). They can be manually operated with a standard hex wrench, so no torque wrench is required.

Thanks to the 'hard-on-hard' metal seals, these valves can operate thousand of items before requiring maintenance. Flex vatring technology enables high sealing forces with comparably low axial forces. Any mounting orientation possible.

Leak rate: valve body, valve seat < 1 x 10^-10 mbar ls^-1
Differential pressure on the gate < 2 bar
Differential pressure at opening < 1 bar
Lifetime >1,000 cycles
Bakeout temperature < 300 °C
Material AISI 316L
Any mounting orientation
Conductance NW 16:5 L/s, NW 40: 50 l/sec
Convenient operation with a standard hexagon wrench?no torque wrench required
Sealing surfaces are only elastically deformed

Part Number Variant

X3202-60097 Valve, all metal UHV, 0.75 inch, 1.33 inch ConFlat Flange
X3202-60098 Valve, all metal UHV, right angle, 1.5 inch
X3202-60107 Seal kit, first replacement, all-metal UHV valve series 54, 0.75 inch
X3202-60108 Seal kit, first replacement, all-metal UHV valve series 54, 1.5 inch
X3202-60109 Seal kit, second replacement, all-metal UHV valve series 54, 0.75 inch
X3202-60110 Seal kit, second replacement, all-metal UHV valve series 54, 1.5 inch

New, factory warranted pumps available.

Price: POA, please contact us for latest prices

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All-Metal UHV Valves Series 54