Precision Vacuum Services Ltd

TEL: 01342 716234
info@precisionvacuumservices.co.uk
Linxon Leak Detection

Reliable and Cost Effective Gas Analysis. The LINXON myRGA provides simple, easy and affordable gas analysis.

LINXON myRGA is a dependable residual gas analyzer (RGA) with the performance and price you need for gas analysis, air leak detection and contamination detection. This simple to use RGA features industry-leading minimum detectable partial pressure (MDPP), signal-to-noise ratio, and data collection speed. This gas analyzer delivers low overall costs of ownership and high mean-time-between-failures (MTBFs) for a cost-effective solution.

myRGA Provides Exceptional Value

LINXON myRGA is designed for use in general vacuum and R&D applications that require the robust performance of this proven RGA. It offers a high level of performance with your choice of 100 or 200 amu mass range. Additionally, myRGA can be equipped with either a standard Faraday Cup detector or with an optional electron multiplier, for applications which require the ability to monitor lower levels of gas concentrations.

The state-of-the-art ion source design used for the myRGA sensor incorporates two filaments in a combined anode, cathode and repeller assembly. The twin filament design includes a backup filament that allows for maximum uptime of the RGA. With myRGA you also get application specific filament choices (either tungsten for halogen containing processes or yttria-coated iridium for oxygen containing processes), ensuring that the process itself will not shorten the filament lifetime. Replacing the filament kit on myRGA is equivalent to replacing the entire ion source of traditional RGAs, providing cost savings that will significantly reduce the total cost of ownership.

Another key feature of the sensor is its ability to measure the total pressure in parallel to its mass spectrometer operation. This pressure measurement can be used to protect the filament from overpressure.

The new sensor design provides the added benefit of a field-replaceable electron multiplier (EM), if equipped. You can quickly replace the EM on-site, during regularly scheduled maintenance. The new multiplier was also developed to provide both higher Faraday Cup (FC) sensitivity and increased gain for longer lifetimes.

myRGA Advantages

  • Low price gas analyzer for air leak detection and process monitoring at an exceptional value
  • Straightforward operation: simple initial set-up due to intuitive software
  • Minimal maintenance and easy, field-replaceable filament and ion source assemblies, and electron multiplier
  • Simple integration options anyone can learn with the http interface and LabVIEW development kit
  • Always in stock for fast delivery

Simple Operation

With myRGA, there is no need to install software. The unit is operated by an integrated onboard web server via a web browser, totally independent from your operating system. Access myRGA via a PC, tablet or smartphone; the onboard web server will dynamically adapt to your screen size and resolution.

If you prefer to use LabVIEW to operate LINXON myRGA, a LabVIEW software development kit is included. Use the LabVIEW driver examples provided to tailor the software to your needs.

Linxon myRGA
Features at a Glance

  • Fast data collection
  • Onboard web server
  • LabVIEW software development kit
  • TCP/IP Ethernet connectivity
  • Dual filaments
  • Field replaceable filament, ion source and electron multiplier
  • Interchangeable sensors and electronics
  • RoHS Compliant

LabVIEW
LabVIEW

Applications

Vacuum Coating Regardless of the type of PVD you utilize in your process (EB-PVD, IB-PVD, standard PVD), LINXON myRGA provides a view into your system unlike any other monitoring method; whether it's monitoring the process chamber for air leaks or your gas lines for contamination. If you need to find out why your chamber is not pumping down to its base vacuum, use the built-in leak check function to find the leak efficiently.

Heat Treating

Any low-pressure heat treating applications can benefit from the use of LINXON myRGA. If you are worried a particular gas will interact with your metal, LINXON myRGA can monitor for that mass and show you its presence and relative amount. LINXON myRGA can also be used for real-time leak monitoring or manual leak checking at base pressures.

myRGA
See What You Need to See
Monitor Scan
Monitor Scan

Tune Mode
Tune Mode

Diagnostics Mode
Diagnostics Mode

Leak Check
Leak Check


LINXON is a new value-priced brand of vacuum instruments, designed and built by INFICON, the leading provider of innovative instrumentation for the vacuum industry. LINXON instruments offer high performance at an unbeatable price, distributed via select local partners, and supported through video tutorials, extensive FAQs, factory-moderated user groups and more. LINXON products are ideal for customers who prefer to do things independently.

TECHNICAL DATA
Type
LIN100F
LIN100M
LIN200F
LIN200M
Sensor Length
14.3 cm
19.9 cm
14.3 cm
19.9 cm
Mass Range
100 amu
100 amu
200 amu
200 amu
Detector Type
FC
EM
FC
EM
Sensitivity (FC)
3E-4 amps/Torr
3E-4 amps/Torr
3E-4 amps/Torr
3E-4 amps/Torr
Sensitivity (EM)
N/A
500 amps/Torr
N/A
500 amps/Torr
Min. Detectable Partial Pressure (3)
2.6E-12 Torr
1.5E-14 Torr
2.6E-12 Torr
1.5E-14 Torr
Max. Sensor Operating Temp. (FC)
200°C
N/A
200°C
N/A
Max. Sensor Operating Temp. (EM)
N/A
150 °C
N/A
150 °C
Filament Type Option
Dual Y2O3/Ir filaments /Dual Tungsten filaments
Dual Y2O3/Ir filaments /Dual Tungsten filaments
Dual Y2O3/Ir filaments /Dual Tungsten filaments
Dual Y2O3/Ir filaments /Dual Tungsten filaments
Resolution (1)
<1 amu Wide
<1 amu Wide
<1 amu Wide
<1 amu Wide
Temperature Coefficient (2)
<1% per °C
<1% per °C
<1% per °C
<1% per °C
Zero Blast (@ mass 2)
<100 ppm
<100 ppm
<100 ppm
<100 ppm
Max. Operating Pressure
5E-4 Torr
5E-4 Torr
5E-4 Torr
5E-4 Torr
Max. Bakeout Temp.
300 °C
300 °C
300 °C
300 °C
Power Input
20-30 V (dc)
20-30 V (dc)
20-30 V (dc)
20-30 V (dc)


DIMENSIONS

Linxon myRGA


LINXON myRGA Documentation:

Manuals & Brochures
LINXON_myRGA_Brochure_2020_English
LINXON_myRGA_Brochure_Chinese
074-723-P1A_LINXON_Operating_Manual_EN
074-723-P1A_Linxon_Operating_Manual_ZH


Modules Guidelines
100_Gas_Theory
200_RGA_Theory
300_How_an_RGA_Works
400_How_to_Communicate_with_the_RGA
500_RGA_Analysis


CAD Models
myRGA_FC_Only_no_Extension_Flange
myRGA_with_EM_no_Extension_Flange
myRGA_with_EM_and_Extension_Flange
myRGA_FC_Only_with_Extension_Flange




Unit 47 Rowfant Business Centre
Wallage Lane
Crawley
West Sussex
RH10 4NQ
Tel: 01342 716234

info@precisionvacuumservices.co.uk



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