The Agilent CDG-500 series of temperature compensated capacitance diaphragm gauges provides the highest level of accuracy in the high-pressure region. Full-scale measurement ranges are available from 1000 to 1 Torr (1333 to 1.3 mbar).

The CDG-500 series uses a corrosion resistant ultra pure alumina ceramic diaphragm providing exceptional signal stability, fast recovery from atmosphere, short warmup times, and unparalleled robustness.

Used in a variety of applications such as thin film and vacuum processes, industrial vacuum processes, data storage, and semiconductor production processes.

Full scale ranges from 1 to 1000 Torr (1.3 to 1333 mbar) with pushbutton zeroing and optional setpoint control providing ease of integration
Excellent long-term signal stability and repeatability
Fast recovery from atmospheric pressures and rapid stabilization after start-up reduces process cycle times
Application robustness is achieved through a corrosion resistant ceramic sensor with sensor-shielding protection
Highest level of accuracy (0.2% of reading)

Part Number Variant

CDG500T0001VCR8S CDG-500 capacitance diaphragm gauge, 1 Torr, with setpoints, VCR8
CDG500T0001VCR8 CDG-500 capacitance diaphragm gauge, 1 Torr, VCR8
CDG500T0001KF16S CDG-500 capacitance diaphragm gauge, 1 Torr, with setpoints, NW16 KF
CDG500T0001KF16 CDG-500 capacitance diaphragm gauge, 1 Torr, NW16 KF
CDG500T0010KF16S CDG-500 capacitance diaphragm gauge, 10 Torr, with setpoints, NW16 KF
CDG500T0010VCR8 CDG-500 capacitance diaphragm gauge, 10 Torr, VCR8
CDG500T0010VCR8S CDG-500 capacitance diaphragm gauge, 10 Torr, with setpoints, VCR8
CDG500T0010KF16 CDG-500 capacitance diaphragm gauge, 10 Torr, NW16 KF
CDG500T0100VCR8S CDG-500 capacitance diaphragm gauge, 100 Torr, with setpoints, VCR8
CDG500T0100KF16S CDG-500 capacitance diaphragm gauge, 100 Torr, with setpoints, NW16 KF
CDG500T0100KF16 CDG-500 capacitance diaphragm gauge, 100 Torr, NW16 KF
CDG500T0100VCR8 CDG-500 capacitance diaphragm gauge, 100 Torr, VCR8
CDG500T1000KF16 CDG-500 capacitance diaphragm gauge, 1000 Torr, NW16 KF
CDG500T1000KF16S CDG-500 capacitance diaphragm gauge, 1000 Torr, with setpoints, NW16 KF
CDG500T1000VCR8 CDG-500 capacitance diaphragm gauge, 1000 Torr, VCR8
CDG500T1000VCR8S CDG-500 capacitance diaphragm gauge, 1000 Torr, with setpoints, VCR8

New, factory warranted pumps available.

Price: POA, please contact us for latest prices

Manual

View Manual

Accuracy

0.2%

Ambient Operating Temperature

+5 to +50 °C

Ambient Storage Temperature

-40 to +65 °C

Analog Output

0-10 VDC

Electrical Connection

D-sub, 15 pole, male

Maximum Baking Temperature

110 °C

Response Time

30 ms

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CDG-500 Capacitance Diaphragm Gauge