The Agilent HS-16 oil diffusion pump is a pump with high throughput and high pumping speed of 6000 L/s. With its fully optimized vapor jet, the robust boiler design and the thermal protection switches the pump will run without any maintenance for many years. It is available with 16 in. ASA or ISO 500K inlet flange.

This pump is a perfect fit for industrial applications such as vacuum furnace, heat treatment, metallizing, and coating processes for optical lenses, electronics and protective film layers.

Fill and drain assembly allows for easy maintenance of pump fluid
Five-stage fractionating jet purifies pumping fluid for cleaner operation
Stable and reliable performance under widely varying operation conditions
Foreline baffle prevents loss of fluid into backing pump system
Fluid-level sight glass provides quick indication of pump fluid status at all times
High forepressure tolerance
Low ultimate pressure
Robust boiler design
High throughput with high pumping speed

Part Number Variant

79292318 HS-16 diffusion pump, 16 in ASA, with halo baffle, 240 V, 8100 W 240 V
79292308 HS-16 diffusion pump, 16 in ASA, with standard cold cap, 240 V, 8100 W 240 V
L5921308 HS-16 diffusion pump, ISO 500K, with standard cold cap, 240 V, 8100 W 240 V
L5921318 HS-16 diffusion pump, ISO 500K, with halo baffle, 240 V, 8100 W 240 V
MSPLD10743 HS-16 diffusion pump, 16 in ASA, with standard cold cap, 380 V, 8100 W 380 V
MSPLD10833 HS-16 diffusion pump, ISO 500K, with halo baffle, 380 V, 8100 W 380 V
MSPD10876 HS-16 diffusion pump, 16 in ASA, with standard cold cap, 400 V, 8100 W 400 V
L5921326 HS-16 diffusion pump, ISO 500K, with standard cold cap, 415 V, 8100 W 415 V
L5921336 HS-16 diffusion pump, ISO 500K, with halo baffle, 415 V, 8100 W 415 V
79292336 HS-16 diffusion pump, 16 in ASA, with halo baffle, 415 V, 8100 W 415 V
79292326 HS-16 diffusion pump, 16 in ASA, with standard cold cap, 415 V, 8100 W 415 V
MSPLD10744 HS-16 diffusion pump, 16 in ASA, with standard cold cap, 460 V, 8100 W 460 V
79292319 HS-16 diffusion pump, 16 in ASA, with halo baffle, 480 V, 8100 W 480 V
79292309 HS-16 diffusion pump, 16 in ASA, with standard cold cap, 480 V, 8100 W 480 V
L5921309 HS-16 diffusion pump, ISO 500K, with standard cold cap, 480 V, 8100 W 480 V
L5921319 HS-16 diffusion pump, ISO 500K, with halo baffle, 480 V, 8100 W 480 V
MSPLD10416 HS-16 diffusion pump, 16 in ASA, with standard cold cap, 575 V, 8100 W 575 V

New, factory warranted pumps available.

Price: POA, please contact us for latest prices

Manual

View Manual

Backstreaming Rate

1.5 x 10-³ mg/cm²/min

Cooldown Time

30 min

Electrical Requirements

3 ph

50/60 Hz

240/415/480 V

Fluid Charge

2839 CC

Fluid Type

Oil

Input Voltage

208, 240, 380, 400, 415, 460, 480, 575 V

Maximum Forepressure - Full Load

0.55 Torr

0.72 mbar

Maximum Forepressure - No Load

0.65 Torr

0.85 mbar

Maximum Throughput

9.5 T-L/s (11.7 mbar-L/s) at 8100 W

Operating Range

2 x 10-³ to <5 x 10-⁸ Torr

1.3 x 10-³ to <6.5 x 10-⁸ mbar

Pump Weight

500 lbs

227 kg

Pumping Speed - Air

6000 L/s

Pumping Speed - Air, via AVS 4.1 (1963)

10000 L/s

Pumping Speed - He/H2

7500 L/s

Recommended Backing Pump

≥ 80 cfm (136 m³/hr)

Warmup Time

30 min

Water Connections

1/4 inch FPT

Water Cooling - Temperature Requirement

60-80 °F

15-26 °C

Water Cooling Flow Requirement

1.5 gpm

300 L/hr

Service Information

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