The Agilent HS-20 oil diffusion pump is a pump with a high throughput and high pumping speed of 10,000 L/s. With its fully optimized vapor jet, robust boiler design and thermal protection switches, the pump will run without any maintenance for many years. It is available with 20 in. ASA or ISO 630K inlet flange.

This pump is a perfect fit for industrial applications such as vacuum furnace, heat treatment, metallizing, and coating processes for optical lenses, electronics, and protective film layers.

Five-stage fractionating jet purifies pumping fluid and assures low base pressure
High tolerable forepressure
Full thermal protection
Fluid-level sight glass provides quick indication of pump fluid status at all times
Fill and drain assembly for pump fluid
Standard gauge port (NW-25) below inlet flange included
Foreline baffle prevents loss of fluid into backing pump system
Optional halo baffle reduces backstreaming without adding height

Part Number Variant

84341317 HS-20 diffusion pump, 20 in ASA, with halo baffle, 208 V, 12000 W 208 V
MSPB1681 HS-20 diffusion pump, ISO 630K, with standard cold cap, 208 V, 12000 W 208 V
MSPLD10746 HS-20 diffusion pump, 20 in ASA, with standard cold cap, 220 V, 12000 W 220 V
84341308 HS-20 diffusion pump, 20 in ASA, with standard cold cap, 240 V, 12000 W 240 V
L5922308 HS-20 diffusion pump, ISO 630K, with standard cold cap, 240 V, 12000 W 240 V
84341318 HS-20 diffusion pump, 20 in ASA, with halo baffle, 240 V, 12000 W 240 V
L5922318 HS-20 diffusion pump, ISO 630K, with halo baffle, 240 V, 12000 W 240 V
MSPLD10841 HS-20 diffusion pump, ISO 630K, with standard cold cap, 380 V, 12000 W 380 V
MSPLD10815 HS-20 diffusion pump, 20 in ASA, with standard cold cap, 380 V, 12000 W 380 V
MSPD10807 HS-20 diffusion pump, 20 in ASA, with halo baffle, 380 V, 12000 W 380 V
84341362 HS-20 diffusion pump, 20 in ASA, with standard cold cap, 400 V, 12000 W 400 V
84341363 HS-20 diffusion pump, 20 in ASA, with halo baffle, 400 V, 12000 W 400 V
84341326 HS-20 diffusion pump, 20 in ASA, with standard cold cap, 415 V, 12000 W 415 V
L5922326 HS-20 diffusion pump, ISO 630K, with standard cold cap, 415 V, 12000 W 415 V
84341336 HS-20 diffusion pump, 20 in ASA, with halo baffle, 415 V, 12000 W 415 V
84341636 HS-20 diffusion pump, 20 in ASA, with halo baffle, 415 V, 12000 W, with oil temperature sensor 415 V
L5922336 HS-20 diffusion pump, ISO 630K, with halo baffle, 415 V, 12000 W 415 V
84341367 HS-20 diffusion pump, 20 in ASA, with halo baffle, 440 V, 12000 W 440 V
84341366 HS-20 diffusion pump, 20 in ASA, with standard cold cap, 440 V, 12000 W 440 V
MSPLD10864 HS-20 diffusion pump, 20 in ASA, with standard cold cap, 460 V, 12000 W 460 V
84341309 HS-20 diffusion pump, 20 in ASA, with standard cold cap, 480 V, 12000 W 480 V
L5922309 HS-20 diffusion pump, ISO 630K, with standard cold cap, 480 V, 12000 W 480 V
84341319 HS-20 diffusion pump, 20 in ASA, with halo baffle, 480 V, 12000 W 480 V
L5922319 HS-20 diffusion pump, ISO 630K, with halo baffle, 480 V, 12000 W 480 V
MSPLD10361 HS-20 diffusion pump, 20 in ASA, with standard cold cap, 575 V, 12000 W 575 V

New, factory warranted pumps available.

Price: POA, please contact us for latest prices

Manual

View Manual

Backstreaming Rate

1.5 x 10-³ mg/cm²/min

Cooldown Time

45 min

Electrical Requirements

3 ph

50/60 Hz

240/415/480 V

Fluid Charge

4731 CC

Fluid Type

Oil

Input Voltage

208, 240, 380, 400, 415, 440, 460, 480, 575 V

Maximum Forepressure - Full Load

0.55 Torr

0.72 mbar

Maximum Forepressure - No Load

0.65 Torr

0.85 mbar

Maximum Throughput

12.5 T-L/s (16.7 mbar-L/s)

Operating Range

1.3 x 10-³ to 5 x 10-⁸ Torr

1.7 x 10-³ to 6.5 x 10-⁸ mbar

Pump Power

12000 W

Pump Weight

600 lbs

272.2 kg

Pumping Speed - Air

10000 L/s

Pumping Speed - Air, via AVS 4.1 (1963)

17500 L/s

Pumping Speed - He/H2

12500 L/s

Recommended Backing Pump

≥ 100 cfm (170 m³/hr)

Warmup Time

45 min

Water Connections

1/4 inch FPT

Water Cooling - Temperature Requirement

60-80 °F

15-26 °C

Water Cooling Flow Requirement

1.5 gpm

300 L/hr

Service Information

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