The Agilent HS-32 oil diffusion pump is a pump with high throughput and high pumping speed of 17,300 L/s. With its fully optimized vapor jet, robust boiler design and thermal protection switches, the pump will run without any maintenance for many years. It is available with 32 in. ASA or ISO 800F (bolted) inlet flange.

This pump is a perfect fit for industrial applications such as vacuum furnace, heat treatment, metallizing, and coating processes for optical lenses, electronics and protective film layers.

Five-stage fractionating jet purifies pumping fluid
Robust boiler design
stability and reliability under widely varying operation conditions
Fill and drain assembly allows for easy exchange of pump fluid
Optional halo baffle cold cap reduces backstreaming without adding height
High forepressure tolerance
Low ultimate pressure
High throughput with high pumping speed
Full thermal protection
Fluid level sight glass provides quick indication of pump fluid status at all times

Part Number Variant

L5923318 HS-32 diffusion pump, ISO 800F, with halo baffle, 240 V, 24000 W 240 V
L5923308 HS-32 diffusion pump, ISO 800F, with standard cold cap, 240 V, 24000 W 240 V
76134318 HS-32 diffusion pump, 32 in ASA, with halo baffle, 240 V, 24000 W 240 V
76134308 HS-32 diffusion pump, 32 in ASA, with standard cold cap, 240 V, 24000 W 240 V
MSPD11040 HS-32 diffusion pump, 32 in ASA, with halo baffle, 380 V, 24000 W, with oil temperature sensor 380 V
L5923663 HS-32 diffusion pump, ISO 800F, with halo baffle, 400 V, 24000 W, with oil temperature sensor 400 V
R1332362 HS-32 diffusion pump, 32 in ASA, with standard cold cap, 400 V, 24000 W 400 V
MSPLD10879 HS-32 diffusion pump, ISO 800F, with standard cold cap, 400 V, 24000 W, with oil temperature sensor 400 V
L5923336 HS-32 diffusion pump, ISO 800F, with halo baffle, 415 V, 24000 W 415 V
L5923326 HS-32 diffusion pump, ISO 800F, with standard cold cap, 415 V, 24000 W 415 V
76134326 HS-32 diffusion pump, 32 in ASA, with standard cold cap, 415 V, 24000 W 415 V
76134336 HS-32 diffusion pump, 32 in ASA, with halo baffle, 415 V, 24000 W 415 V
MSPD10877 HS-32 diffusion pump, 32 in ASA, with halo baffle, 440 V, 24000 W 440 V
L5923666 HS-32 diffusion pump, ISO 800F with standard cold cap, 440 V, 24000 W, with oil temperature sensor 440 V
L5923667 HS-32 diffusion pump, ISO 800F, with halo baffle, 440 V, 24000 W, with oil temperature sensor 440 V
L5923319 HS-32 diffusion pump, ISO 800F, with halo baffle, 480 V, 24000 W 480 V
L5923309 HS-32 diffusion pump, ISO 800F, with standard cold cap, 480 V, 24000 W 480 V
76134309 HS-32 diffusion pump, 32 in ASA, with standard cold cap, 480 V, 24000 W 480 V
76134319 HS-32 diffusion pump, 32 in ASA, with halo baffle, 480 V, 24000 W 480 V
MSPLD10873 HS-32 diffusion pump, ISO 800F, with standard cold cap, 575 V, 24000 W, with oil temperature sensor 575 V
MSPLD10858 HS-32 diffusion pump, 32 in ASA, with standard cold cap, 575 V, 24000 W, with oil temperature sensor 575 V

New, factory warranted pumps available.

Price: POA, please contact us for latest prices

Manual

View Manual

Backstreaming Rate

7 x 10-⁴ mg/cm²/min

Cooldown Time

60 min

Electrical Requirements

3 ph

50/60 Hz

240/415/480 V

Fluid Charge

11356 CC

Fluid Type

Oil

Input Voltage

240, 380, 400, 415, 440, 480, 575 V

Maximum Forepressure - Full Load

0.35 Torr

0.45 mbar

Maximum Forepressure - No Load

0.50 Torr

0.65 mbar

Maximum Throughput

30 T-L/s (40 mbar-L/s)

Operating Range

1.7 x 10-³ to <5 x 10-⁸ Torr

2.3 x 10-³to <6.5 x 10⁸ mbar

Pump Power

24000 W

Pump Weight

1500 lbs

680.4 kg

Pumping Speed - Air

17300 L/s

Pumping Speed - Air, via AVS 4.1 (1963)

32000 L/s

Pumping Speed - He/H2

21625 L/s

Recommended Backing Pump

≥ 300 cfm (510 m³/hr)

Warmup Time

60 min

Water Connections

3/8 inch FPT

Water Cooling - Temperature Requirement

60-80 °F

15-26 °C

Water Cooling Flow Requirement

4.0 gpm

800 L/hr

Service Information

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