The high-throughput Agilent Turbo-V 1K-G turbomolecular pump is a dedicated vacuum pumping system offering 1000 L/s pumping speed. The Turbo-V 1K-G is designed for industrial use, specifically as a turbo pump for thin film deposition equipment. Its pumping stages, and the entire pump structure, are optimized to work with very high flows of argon under high temperature load.

Typical industrial vacuum coating applications include solar and flat panel display manufacturing. The pump's robust design and its advanced electronics, rack type or onboard solution, make the Turbo-V 1K-G the optimum pumping solution for the vacuum coating industry.

Application-specific pumping solution designed for thin film deposition
Optimized to work with very high flows of argon
Capability to manage high gas flow, enabling operation in high-throughput applications with DN 160 or 200
Rugged design and highly efficient cooling system for continuous operation
Pump gas purge protects pump bearings and allows seamless operation with system contaminants and particulates
Low noise levels for zero impact on the system
Compact size and installation in any position allow easy integration
Maintenance-free bearings for zero operating cost
Ready for wireless control via Vacuum Link app for pump operation on the go
Versatile electronics interfaces

Part Number Variant

8698961R002 - Turbo-V 1K-G pump, DN 160 ISO-F inlet flange, KF25 foreline flange
8698962R001 - Turbo-V 1K-G pump, DN 200 ISO-F inlet flange, KF40 foreline flange
8698962R004 - Turbo-V 1K-G pump, DN 200 CF-F (10 in CFF) inlet flange

New, factory warranted pumps available.

Price: POA, please contact us for latest prices

Manual

View Manual

Ambient Operating Temperature

+5 to +35 °C

Ambient Storage Temperature

-20 to +70 °C

Base Pressure

<1 x 10^-10 mbar

Compression Ratio H2

1.5 x 10⁴

Compression Ratio He

>4 x 10⁴

Compression Ratio N2

>5 x 10⁷

Flange Type

DN 160 ISO-F, DN 200 ISO-F

Foreline Flange Size

KF 25 NW, KF 40 NW

Foreline Tolerance - N2

2 mbar

Nominal Rotation Speed

45660 rpm (761 Hz driving frequency)

Operating Position

Any

Pumping Speed - Ar

1040 L/s (ISO 200)

Pumping Speed - H2

730 L/s (ISO 200)

Pumping Speed - He

1150 L/s (ISO 200)

Pumping Speed - N2

1080 L/s (ISO 200)

Recommended Forepump Capacity

20 m³/h

Standards and Certifications

UNI EN 292-1
UNI EN 292-2
EN 55011Cl. A
EN 61000-4-2
EN 61000-4-3
EN 61000-4-4
EN 61000-4-5
EN 61010-1
EN 1012-2

Start Up Time

< 5 min

Vibration Level

< 0.01 µm at inlet flange

Weight

26.8 kg

Service Information

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