The Agilent Turbo-V 3K-G high-throughput turbomolecular pump is a dedicated vacuum pumping system, designed specifically as a turbo pump for thin film deposition equipment. Its pumping stages, and the entire pump structure, are optimized to work with very high flows of argon under high temperature load.

This robust turbo pump is suitable for harsh manufacturing environments because of its rugged design. Typical industrial vacuum coating applications include solar and flat panel display manufacturing. The pump's robust design and its advanced integrated electronics make the Turbo-V 3K-G the optimum pumping solution for the vacuum coating industry.

Application-specific pumping solution designed for thin film deposition
Optimized to work with very high flows of argon
Integrated pump and controller can be installed in any position for simple operation with a reduced footprint
Capability to manage high gas flow, enabling operation in high-throughput applications with DN 250
Rugged design and highly efficient cooling system for continuous operation
Pump gas purge protects pump bearings and allows seamless operation with system contaminants and particulates
Low noise level for zero impact on the system
Maintenance-free bearings for zero operating cost
Ready for wireless control via Vacuum Link app for pump operation on the go and profibus
Versatile electronic interface including analog I/O signals and RS232/RS485 for remote controlling by A-Plus software

New, factory warranted pumps available.

Price: POA, please contact us for latest prices

Manual

View Manual

Ambient Operating Temperature

+5 to +35 °C

Ambient Storage Temperature

-20 to +70 °C

Base Pressure

<1 x 10^-8 mbar

Compression Ratio He

6 x 10³

Compression Ratio N2

>1 x 10⁷

Flange Type

DN 250 ISO-F

Foreline Flange Size

KF 40 NW

Foreline Tolerance - N2

0.5 mbar

Nominal Rotation Speed

31800 rpm (530 Hz driving frequency

Operating Position

Any

Pumping Speed - Ar

2050 L/s

Pumping Speed - He

1900 L/s

Pumping Speed - N2

2200 L/s

Recommended Forepump Capacity

60 m³/h

Standards and Certifications

EN 55011 (Radio disturbance characteristics)
EN 61000-3-2 (Limits for harmonic current emissions)
EN 61000-3-3 (Limitation of voltage changes, voltage fluctuations and flicker)
EN 61000-6-2 and EN 61326 (Immunity for industrial environments) which recall:
EN 61000-4-2 (Electrostatic discharge phenomena)
EN 61000-4-3 (Radiated high-frequency phenomena)
EN 61000-4-4, EN 61000-4-5, EN61000-4-6 (Conducted high frequency phenomena)
EN 61000-4-11 (Voltage fluctuation, voltage dips and short interruptions)

Start Up Time

< 6 min

Weight

52 kg

Service Information

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