The TwisTorr 84 FS is a small, 80 L/s turbo pump offering extremely low partial pressures for light gases. The synergy between turbo technology and innovative TwisTorr drag stages results in a high compression ratio, ideal for research and development, UHV systems, and nuclear research.

Its floating suspension (AFS) enables low vibration and noise level, making it compatible with sensitive instrumentation and work environments. The unique cantilever suspension ensures no magnetic interferences with your application and no hydrocarbon contamination.

Extreme compression ratios for light gases and hydrocarbon free design, enabling low base pressure
Remote controller allows operation from 100 m away
High foreline tolerance allows smaller foreline pumps, reducing cost and footprint
Low vibration and noise levels-41 dBA-for a comfortable working environment and operation in sensitive experiments
Maintenance-free bearings for zero operating cost
Compact size and installation in any position allow easy integration
Gauge reading capability for system pressure monitoring
Ready for wireless control via Vacuum Link app for pump operation on the go
Radiation and magnetic field-proof design, with no embedded electronics, allows operation in demanding magnetic field and radiation environments
Low electromagnetic emission guarantees no interference with application process

Part Number Variant

X3502-64000 - TwisTorr 84 FS turbo pump, DN 63 ISO-K
X3502-64001 - TwisTorr 84 FS turbo pump, DN 40 ISO-KF
X3502-64002 - TwisTorr 84 FS turbo pump, DN 63 CF-F (4.5 in CFF)
X3502-64003 - TwisTorr 84 FS turbo pump, DN 40 CF-F (2.75 in CFF)
X3502-64010 - TwisTorr 84 FS turbo pump, DN 63 ISO-K, for Scanning Electron Microscopes (SEM)
X3502-64200 - TwisTorr 84 FS turbo pump, dual flow, for Scanning Electron Microscopes (SEM)
X3502-64300 - TwisTorr 84 FS turbo pump, dual flow

New, factory warranted pumps available.

Price: POA, please contact us for latest prices

Manual

View Manual

Ambient Operating Temperature

+5 to +35 °C

Ambient Storage Temperature

-40 to +70 °C

Base Pressure

<5 x 10^-10 mbar

Compression Ratio H2

1 x 10⁴

Compression Ratio He

2 x 10⁵

Compression Ratio N2

1 x 10⁹

Cooling Method

Air cooling, Water cooling

Flange Type

DN 63, KF 40

Foreline Flange Size

KF 16 NW

Foreline Tolerance - N2

12 mbar

Maximum Gas Throughput - Ar, Water Cooling

80 sccm

Maximum Gas Throughput - N2, Water Cooling

130 sccm

Noise Level

40 dB(A)

Nominal Rotation Speed

70000 rpm (1167 Hz driving frequency)

Operating Position

Any

Pumping Speed - Ar

59 L/s

Pumping Speed - H2

42 L/s

Pumping Speed - He

54 L/s

Pumping Speed - N2

60 L/s

Recommended Forepump Capacity

3 m³/h

Standards and Certifications

CE, C-CSA-US, RoHS compliant as per 2011/65/UE

Start Up Time

< 2 min

Service Information

Leak Detectors Home

PVS Refurbished Equipment

Fittings

Gauging & Measurement

Agilent

Edwards

Leybold

Linxon

TwisTorr 84 FS Turbo Pump

Vacuum Pump Service

Edwards Vacuum Pump Service

TwisTorr 84 FS Turbo Pump