The VHS-10 Diffusion Pump has a pumping speed of up to 3650 L/s and can be ordered with ASA or ISO flanges, standard or extended cold caps, and a variety of voltages. The patented Bulge Contour increases gas capture and maintains lower pressure. All VHS series pumps have sight glass/fill and drain assemblies for continuous monitoring and easy maintenance of pump fluid. Finned boilers increase surface area, prolonging pumping fluid life.

This vapor jet pump is a perfect fit for industrial applications such as vacuum furnace, heat treatment, metallizing, and coating processes for optical lenses, electronics and protective film layers.

Patented Bulge Contour increases gas capture
Fluid level sight glass provides a quick indication of pump fluid status at all times
Fill and drain assembly for easy maintenance of pump fluid
High throughput
Fractionating jet purifies fluid for cleaner operation
High tolerable forepressure
Full thermal protection safeguards against all thermal overloads
Stainless steel pump body
Finned boiler increases surface area, prolonging pumping fluid life
Quick cool coil is standard

Part Number Variant

L5920307 VHS-10 diffusion pump, ISO 320K, with standard cold cap, 208 V, 4400 W 208 V
L5920317 VHS-10 diffusion pump, ISO 320K, with extended cold cap, 208 V, 4400 W 208 V
F0426317 VHS-10 diffusion pump, 10 in ASA, with extended cold cap, 208 V, 4400 W 208 V
F0426307 VHS-10 diffusion pump, 10 in ASA, with standard cold cap, 208 V, 4400 W 208 V
L5920308 VHS-10 diffusion pump, ISO 320K, with standard cold cap, 240 V, 4400 W 240 V
L5920318 VHS-10 diffusion pump, ISO 320K, with extended cold cap, 240 V, 4400 W 240 V
F0426308 VHS-10 diffusion pump, 10 in ASA, with standard cold cap, 240 V, 4400 W 240 V
F0426318 VHS-10 diffusion pump, 10 in ASA, with extended cold cap, 240 V, 4400 W 240 V
MSPD10884 VHS-10 diffusion pump, ISO 320K, with standard cold cap, 380 V, 4400 W, with oil temperature sensor 380 V
L5920326 VHS-10 diffusion pump, ISO 320K, with standard cold cap, 380 V, 4400 W 380 V
L5920336 VHS-10 diffusion pump, ISO 320K, with extended cold cap, 380 V, 4400 W 380 V
F0426326 VHS-10 diffusion pump, 10 in ASA, with standard cold cap, 380 V, 4400 W 380 V
F0426336 VHS-10 diffusion pump, 10 in ASA, with extended cold cap, 380 V, 4400 W 380 V
MSPLD10852 VHS-10 diffusion pump, 10 in ASA, with standard cold cap, 400 V, 4400 W 400 V
L5920309 VHS-10 diffusion pump, ISO 320K, with standard cold cap, 480 V, 4400 W 480 V
L5920319 VHS-10 diffusion pump, ISO 320K, with extended cold cap, 480 V, 4400 W 480 V
L5920329 VHS-10 diffusion pump, ISO 320K, with standard cold cap, 480 V, 5100 W 480 V
L5920339 VHS-10 diffusion pump, ISO 320K, with extended cold cap, 480 V, 4400 W 480 V
F0426339 VHS-10 diffusion pump, 10 in ASA, with extended cold cap, 480 V, 5100 W 480 V
F0426309 VHS-10 diffusion pump, 10 in ASA, with standard cold cap, 480 V, 4400 W 480 V
F0426319 VHS-10 diffusion pump, 10 in ASA, with extended cold cap, 480 V, 4400 W 480 V
MSPLD10415 VHS-10 diffusion pump, 10 in ASA, with extended cold cap, 575 V, 4400 W 575 V

New, factory warranted pumps available.

Price: POA, please contact us for latest prices

Manual

View Manual

Backstreaming Rate

5.0 x 10-⁴ mg/cm²/min

Cooldown Time

25 min

Electrical Requirements

3 ph

50/60 Hz

208/240/380/480 V

Fluid Charge

1000 CC

Fluid Type

Oil

Input Voltage

208, 240, 380, 400, 440, 480, 575 V

Maximum Forepressure - Full Load

0.55 Torr

0.72 mbar

Maximum Forepressure - No Load

0.65 Torr

0.85 mbar

Maximum Throughput

6.3 T-L/s (8.4 mbar-L/s)

Operating Range

1.7 x 10-³ to <5 x 10-⁹ Torr

2.3 x 10-³ to <6.5 x 10-⁹ mbar

Pump Power

4400 W

Pump Weight

150 lbs

68 kg

Pumping Speed - Air

3650 L/s

Pumping Speed - Air, via AVS 4.1 (1963)

5300 L/s

Pumping Speed - He/H2

4560 L/s

Recommended Backing Pump

≥ 30 cfm (51 m³/hr)

Warmup Time

15 min

Water Connections

1/8 inch FPT

Water Cooling - Temperature Requirement

60-80 °F

15-26 °C

Water Cooling Flow Requirement

0.40 gpm

80 L/hr

Service Information

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VHS-10 Diffusion Pump