The VHS-4 diffusion pump has a pumping speed of up to 750 L/s and can be ordered with ASA or ISO flanges, standard or extended cold caps, with a variety of voltages. All VHS pumps have a stainless steel pump body and a sight glass/fill and drain assembly for continuous monitoring and easy maintenance of pump fluid. The patented Bulge Contour increases gas capture and maintains lower pressure. Finned boilers increase surface area, prolonging pumping fluid life.

This vapor jet pump is a perfect fit for high vacuum and industrial applications such as vacuum furnace, heat treatment, metallizing, and coating processes for optical lenses, electronics and protective film layers.

Patented Bulge Contour increases gas capture
Fluid-level sight glass provides a quick indication of pump fluid status at all times
Fill and drain assembly for easy maintenance of pump fluid
Fractionating jet purifies pumping fluid for cleaner operation
High tolerable forepressure
Full thermal protection safeguards against all thermal overloads
Stainless steel pump body, flange and jet
Finned boiler increases surface area, prolonging fluid life
Foreline baffle prevents fluid loss to backing system
Quick cool coil is standard

Part Number Variant

86460301 VHS-4 diffusion pump, 4 in ASA, with standard cold cap, 120 V, 1450 W 120 V
86460311 VHS-4 diffusion pump, 4 in ASA, with extended cold cap, 120 V, 1450 W 120 V
L6256301 VHS-4 diffusion pump, ISO 160K, with standard cold cap, 120 V, 1450 W 120 V
L6256311 VHS-4 diffusion pump, ISO 160K, with extended cold cap, 120 V, 1450 W 120 V
86460306 VHS-4 diffusion pump, 4 in ASA, with standard cold cap, 208 V, 1450 W 208 V
86460316 VHS-4 diffusion pump, 4 in ASA, with extended cold cap, 208 V, 1450 W 208 V
L6256306 VHS-4 diffusion pump, ISO 160K, with standard cold cap, 208 V, 1450 W 208 V
L6256316 VHS-4 diffusion pump, ISO 160K, with extended cold cap, 208 V, 1450 W 208 V
86460302 VHS-4 diffusion pump, 4 in ASA, with standard cold cap, 240 V, 1450 W 240 V
86460312 VHS-4 diffusion pump, 4 in ASA, with extended cold cap, 240 V, 1450 W 240 V
L6256302 VHS-4 diffusion pump, ISO 160K, with standard cold cap, 240 V, 1450 W 240 V
L6256312 VHS-4 diffusion pump, ISO 160K, with extended cold cap, 240 V, 1450 W 240 V
MSPB0196 VHS-4 diffusion pump, 4 in ASA, with extended cold cap, 400 V, 1450 W 400 V

New, factory warranted pumps available.

Price: POA, please contact us for latest prices

Manual

View Manual

Backstreaming Rate

5 x 10-⁴ mg/cm²/min

Cooldown Time

10 min

Electrical Requirements

1 ph

50/60 Hz

120/208/240 V

Fluid Charge

300 CC

Fluid Type

Oil

Input Voltage

120, 208, 240, 400, 480 V

Maximum Forepressure - Full Load

0.55 Torr

0.73 mbar

Maximum Forepressure - No Load

0.65 Torr

0.86 mbar

Maximum Throughput

1.5 T-L/s (2.0 mbar-L/s)

Operating Range

2 x 10-³ to <5 x 10-⁹ Torr

2.7 x 10-³ to <6.5 x 10-⁹ mbar

Pump Power

1450 W

Pump Weight

55 lbs

25 kg

Pumping Speed - Air

750 L/s

Pumping Speed - Air, via AVS 4.1 (1963)

1200 L/s

Pumping Speed - He/H2

940 L/s

Recommended Backing Pump

≥ 10 cfm (17 m³/hr)

Warmup Time

10 min

Water Connections

1/8 inch FPT

Water Cooling - Temperature Requirement

60-80 °F

15-26 °C

Water Cooling Flow Requirement

0.15 gpm

30 L/hr

Service Information

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