The VHS-6 Diffusion Pump has a pumping speed of up to 1550 L/s and can be ordered with ASA or ISO flanges, standard or extended cold caps, with a variety of voltages. All VHS series pumps have sight glass/fill and drain assemblies for continuous monitoring and easy maintenance of pump fluid. The patented Bulge Contour increases gas capture and maintains lower pressure. Finned boilers increase surface area, prolonging pumping fluid life. This Vapor Jet Pump is a perfect fit for high vacuum and industrial applications such as vacuum furnace, heat treatment, metallizing, and coating processes for optical lenses, electronics and protective film layers.

Patented Bulge Contour increases gas capture
Fluid-level sight glass provides a quick indication of pump fluid status at all times
Fill and drain assembly for easy maintenance of pump fluid
Fractionating jet purifies pumping fluid for cleaner operation
High tolerable forepressure
Full thermal protection safeguards against all thermal overloads
Stainless steel pump body and jet
Finned boiler increases surface area, prolonging pumping fluid life
Foreline baffle prevents fluid loss into backing system
Quick cool coil is standard

Part Number Variant

85826301 VHS-6 diffusion pump, 6 in ASA, with standard cold cap, 120 V, 2200 W 120 V
85826311 VHS-6 diffusion pump, 6 in ASA, with extended cold cap,120 V, 2200 W 120 V
L6193301 VHS-6 diffusion pump, ISO 200K, with standard cold cap, 120 V, 2200 W 120 V
L6193311 VHS-6 diffusion pump, ISO 200K, with extended cold cap, 120 V, 2200 W 120 V
85826306 VHS-6 diffusion pump, 6 in ASA, with standard cold cap, 208 V, 2200 W 208 V
85826316 VHS-6 diffusion pump, 6 in ASA, with extended cold cap, 208 V, 2200 W 208 V
L6193306 VHS-6 diffusion pump, ISO 200K, with standard cold cap, 208 V, 2200 W 208 V
L6193316 VHS-6 diffusion pump, ISO 200K, with extended cold cap, 208 V, 2200 W 208 V
85826302 VHS-6 diffusion pump, 6 in ASA, with standard cold cap, 240 V, 2200 W 240 V
85826312 VHS-6 diffusion pump, 6 in ASA, with extended cold cap, 240 V, 2200 W 240 V
L6193302 VHS-6 diffusion pump, ISO 200K, with standard cold cap, 240 V, 2200 W 240 V
L6193312 VHS-6 diffusion pump, ISO 200K, with extended cold cap, 240 V, 2200 W 240 V
MSPLD10783 VHS-6 diffusion pump, ISO 200K, with standard cold cap, 380 V, 2200 W 380 V
MSPLD10041 VHS-6 diffusion pump, 6 in ASA, with standard cold cap, 480 V, 2200 W 480 V
MSPLD10640 VHS-6 diffusion pump, ISO 200K, with extended cold cap, 480 V, 2200 W 480 V

New, factory warranted pumps available.

Price: POA, please contact us for latest prices

Manual

View Manual

Backstreaming Rate

5 x 10-⁴ mg/cm²/min

Cooldown Time

10 min

Electrical Requirements

1 ph

50/60 Hz

120/208/240 V

Fluid Charge

500 CC

Fluid Type

Oil

Input Voltage

120, 208, 240, 380, 480 V

Maximum Forepressure - Full Load

0.55 Torr

0.72 mbar

Maximum Forepressure - No Load

0.65 Torr

0.85 mbar

Maximum Throughput

2.4 T-L/s (3.2 mbar-L/s)

Operating Range

1.5 x 10-³ to <5 x 10-⁹ Torr

2 x 10-³ to <6.5 x 10-⁹ mbar

Pump Power

2200 W

Pump Weight

75 lbs

34 kg

Pumping Speed - Air

1550 L/s

Pumping Speed - Air, via AVS 4.1 (1963)

2400 L/s

Pumping Speed - He/H2

1930 L/s

Recommended Backing Pump

≥ 17.0 cfm (28.9 m³/hr)

Warmup Time

10 min

Water Connections

1/8 inch FPT

Water Cooling - Temperature Requirement

60-80 °F

15-26 °C

Water Cooling Flow Requirement

0.25 gpm

50 L/hr

Service Information

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